298.45
Offers an overview of MEMS development and provides demonstrations of examples of MEMS in space. This work explores factors common to the various described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices.
- : Taylor & Francis Inc
- : Taylor & Francis Inc
- : 9780824726379
- : Engels
- : Hardcover
- : 400
- : oktober 2005
- : 700
- : 215 x 140 x 27 mm.
- : Werktuigbouwkunde